Addressable Defect Monitor Design Utilizing Photo-Emitting Fault Location
Original Publication Date: 1987-Sep-01
Included in the Prior Art Database: 2005-Feb-01
A defect monitor design useful for early failure analysis and ground rule generation utilizes diffusions, a conducting line, a terminal and a microscope to visually detect fault locations. (Image Omitted) By utilizing a photo-emitting defect monitor with an addressable feature, fault locations and fault extent will become visible through a normal microscope. Scanning electron microscopes (SEMs), transmission electron microscopes (TEMs) and other sophisticated electronics are not required. To visually detect faults, a simple photo-emitting defect monitor design is utilized. It consists of a comb of long metal lines M1 and a plurality of photo-emitting cell structures (unit cell) placed parallel to the long lines. Fig.