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Addressable Defect Monitor Design Utilizing Photo-Emitting Fault Location

IP.com Disclosure Number: IPCOM000040083D
Original Publication Date: 1987-Sep-01
Included in the Prior Art Database: 2005-Feb-01

Publishing Venue

IBM

Related People

Authors:
Holland, KL Voldman, SH Wolffing, B [+details]

Abstract

A defect monitor design useful for early failure analysis and ground rule generation utilizes diffusions, a conducting line, a terminal and a microscope to visually detect fault locations. (Image Omitted) By utilizing a photo-emitting defect monitor with an addressable feature, fault locations and fault extent will become visible through a normal microscope. Scanning electron microscopes (SEMs), transmission electron microscopes (TEMs) and other sophisticated electronics are not required. To visually detect faults, a simple photo-emitting defect monitor design is utilized. It consists of a comb of long metal lines M1 and a plurality of photo-emitting cell structures (unit cell) placed parallel to the long lines. Fig.