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High-Speed Micro-Positioner Disclosure Number: IPCOM000040265D
Original Publication Date: 1987-Oct-01
Included in the Prior Art Database: 2005-Feb-02

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Karidis, JP [+details]


Using flat moving coil actuators as links in a ground-based multiple link pantograph positioner provides a simple, frictionless fine positioner with a degree of freedom for each actuator. Moving-coil actuators provide extremely high acceleration potential and flexure-type pivots to provide frictionless motion capability. Fig. 1 shows a schematic example of a three-degrees-of-freedom micro-positioner. Fig. 2 is a schematic of the two-degrees-of-freedom portion. A pair of pancake-type moving-coil actuators drives ground- based links in a conventional five-bar linkage, as shown in Fig. 2, and another actuator and links set provides the orthogonal drive. (In mechanism design terminology, the fixed ground element is always counted as a link; therefore, a mechanism with four physical links 1-4, as shown in Fig.