Electrostatic Discharge Monitor
Original Publication Date: 1987-Oct-01
Included in the Prior Art Database: 2005-Feb-02
By means of a special shape incorporated in a conductive thin film pattern, electrostatic discharge between conductive regions is confined to known positions. Variation in design of the special shape permits determination of the large potential differences which can occur between conductive regions, for instance, in a process. Process changes aimed at reduction or elimination of destructive arcing between conductive regions are monitored effectively by incorporation of the special shape in monitors or product. In many areas of semiconductor processing, inclusive of mask manufacture, electrostatic discharges cause defects. The incorporation in chrome masks of a shape such as that shown in the figure has been found useful in monitoring process changes made to reduce electrostatic discharge defects.