Components Handler for Corrosive Environment
Original Publication Date: 1987-Oct-01
Included in the Prior Art Database: 2005-Feb-02
Holders made of quartz and supported on a gas bearing film on a flat surface enable processing of components in a subatmospheric pressure and corrosive environment. With reference to the figures, bottomless component holders 1 are constructed of rectangular pieces of quartz assembled with suitable optical cement to form a closed chamber 2 when placed on flat base 3. The holder has a longitudinal groove 4 along either side to receive planar components 5, such as circuit substrates, and the components are loaded and unloaded through end port 6, sealed by a quartz plug 7 with O-ring 8. A spring may be inserted in one groove 4 to urge components toward the opposite groove.