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Force Measurement With High Sensitivity Application to Surface Inspection at the Angstrom Scale

IP.com Disclosure Number: IPCOM000040506D
Original Publication Date: 1987-Nov-01
Included in the Prior Art Database: 2005-Feb-02

Publishing Venue

IBM

Related People

Authors:
Martin, Y Wickramasinghe, HK Williams, CC [+details]

Abstract

A new technique measures forces, down to 5 x 10-16N on a sub-micron scale. A small tip, having a diameter D&100Ao, at the end of a spring is vibrated close to a solid. Linear and non linear AC contact forces between the tip and the solid are measured through the resulting tip displacement with a highly sensitive laser probe. Profiling and "contact" inspection can be done nondestructively on an Angstrom scale. In operation, a metallic spring tip is mounted on a small PZT transducer and vibrated close to the surface of the solid to be examined. A laser heterodyne probe accurately measures the AC displacement of the spring.