Overcoat on Metallic Magnetic Disks
Original Publication Date: 1987-Nov-01
Included in the Prior Art Database: 2005-Feb-02
The overcoat consists of a fluoropolymer, has pores and is wetted with perfluorinated lubricants. It is formed by plasma polymerization and subsequent plasma etching. In a plasma generator, magnetic disk 1 is cleaned by cautious plasma etching. On the cleaned surface, a fluorinated material is plasma deposited in a CF4/H2 atmosphere and polymerized. By appropriately tuning the process parameters, the properties of the deposited fluoropolymer 2 are adjusted such that its wear resistance is high and pores 3 are formed (Fig. 1). Then, fluoropolymer 2 is plasma etched in a CF4 atmosphere, decreasing the layer thickness and enlarging the pores (Fig. 2). The enlarged pores are used as reservoirs for lubricant 4 (Fig. 3).