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Electrostatic Dissipative Vacuum Pencil

IP.com Disclosure Number: IPCOM000040587D
Original Publication Date: 1987-Dec-01
Included in the Prior Art Database: 2005-Feb-02

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Horstmann, RE Kopecky, HR Peabody, DL Szecsy, AP Walsh, TJ [+details]


It has been proposed to modify vacuum pencils used in handling semiconductor wafers to enable them to effect wafer surface charge dissipation. In the processing of semiconductor wafers the problem of static electricity becomes of increasing concern as the complexity of devices increases and device tolerances decrease. A simple and effective method to dissipate electrostatic charges on semiconductor wafer surfaces is to make the vacuum pencil assembly a conductive link to drain the charges to ground. The manual handling of semiconductor wafers is achieved through the use of vacuum pencils or wands. Conventional vacuum pencils do not have electrically conductive characteristics.