Ferris Wheel Wafer Loader
Original Publication Date: 1987-Dec-01
Included in the Prior Art Database: 2005-Feb-02
A technique is described whereby a four-platform ferris wheel loader provides the mechanism for automatically holding semiconductor wafers inside an electron beam chamber during processing. The concept is an improvement over prior manual loading techniques in that the ferris wheel approach enables automatic position loading of wafers to be processed. The ferris wheel wafer loader is designed to provide a holding platform for silicon wafers while in an E-beam chamber. Wafers are loaded onto platforms 10, 11, 12 and 13, as shown in the figure, prior to evacuating the chamber. The platforms are mounted onto wheels 14 and 15, which are so designed so that the platforms will always be horizontal as the ferris wheel is rotated.