Fixed Probe Plate for Auto Aligners
Original Publication Date: 1987-Dec-01
Included in the Prior Art Database: 2005-Feb-02
Auto alignment tools used in semiconductor processing operations are modified substantially to reduce particulate contamination. All moving parts are removed from existing aligners and replaced with fixed probes. With existing alignment tools the plates have three moving probes which lock in place with use of an air bearing. Despite their being made of stainless steel and being rotated in and out by the air cylinders and the air bearing, particulates are in evidence formed by the movement of the parts and the turbulence that is created. This results in undesirable contamination of the semiconductor wafers being positioned on the non-contact focal registration X-Y-O plate of the tool. The modification shown in the drawing utilizes a stainless steel plate 1 with four ports.