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Electrical Measurement of Dimensions of Isolated Patterns

IP.com Disclosure Number: IPCOM000040783D
Original Publication Date: 1987-Jan-01
Included in the Prior Art Database: 2005-Feb-02

Publishing Venue

IBM

Related People

Authors:
Lin, BJ [+details]

Abstract

Isolated patterns of metal removed from a thin metal film change electrical resistance of the metal film by predictable and measureable amounts. A four point probe measurement of a metal film containing such patterns is described for fast, ac- curate dimensional assessment.