Photochemical Deposition of Silicon Nitride
Original Publication Date: 1987-Jan-01
Included in the Prior Art Database: 2005-Feb-02
Silicon nitride films can be photochemically deposited from mixtures of silane (SiH4) and ammonia (NH3) or disilane (Si2H6) and ammonia using 193 nm radiation from an excimer laser. Instead of silane or disilane as silicon sources, dis-silylamine(SiH3)2NH or tris-silylamine(SiH3)N can be used. Both of these materials are liquids having sufficient room temperature vapor pressures and sufficient chemical stability to be used in photochemical deposition of thin films.