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Anticoincidence Technique to Suppress Noise in Scanning Electron Microscopes

IP.com Disclosure Number: IPCOM000040814D
Original Publication Date: 1987-Jan-01
Included in the Prior Art Database: 2005-Feb-02

Publishing Venue

IBM

Related People

Authors:
Jenkins, KA [+details]

Abstract

A technique is described for suppressing unwanted noise signals from rescattering of backscattered electrons. In many cases of electron microscopy, only the secondary emission electrons are of interest. The detector is usually placed so that backscattered electrons, due to their directional nature, do not strike the scintillator. Some backscattered electrons will, however, strike a nearby surface and rescatter, or create secondary electrons (commonly called Type III electrons). If they reach the detector, these electrons become an unwanted part of the signal.