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Protective Coating for Tungsten Bonding Tips

IP.com Disclosure Number: IPCOM000040822D
Original Publication Date: 1987-Jan-01
Included in the Prior Art Database: 2005-Feb-02

Publishing Venue

IBM

Related People

Authors:
Chalco, PA Gupta, A Hussey, BW Joshi, RV [+details]

Abstract

An adherent and effective oxidation-resistant coating for high temperature tungsten bonding tips is provided by depositing onto the tips tungsten silicide having excess silicon to form a better protective oxide layer.