Improved Metal Adhesion to Polyimide
Original Publication Date: 1987-Feb-01
Included in the Prior Art Database: 2005-Feb-02
A method of increasing the adhesion of thin film metallurgies, comprising successive layers of chromium (Cr), copper (Cu), and chromium (Cr), to polyimide substrates permits the design of ultra fine line circuitry. The method is described in the following.