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Test Structures for Transistor Chains with Isolation Integrity

IP.com Disclosure Number: IPCOM000040841D
Original Publication Date: 1987-Feb-01
Included in the Prior Art Database: 2005-Feb-02

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Hershberger, DB [+details]


Disclosed is a method for early defect monitoring and diagnosi of semiconductor devices during the manufacturing process. This paper suggests the interconnection of polysilicon (poly) lines to form mazes at the masterslice level.