Novel Dual Exposure Quartz Mask Design
Original Publication Date: 1987-Feb-01
Included in the Prior Art Database: 2005-Feb-02
The chromium metal coating used on optical masks to prevent li exposure in selective mask areas has the property of transmitting (or reflecting) various wavelengths of light with various effici- encies. Using this property, a novel photo mask capable of exposing different sized features, at different wavelengths of ultraviolet light, can be constructed.