Browse Prior Art Database

Novel Dual Exposure Quartz Mask Design

IP.com Disclosure Number: IPCOM000040849D
Original Publication Date: 1987-Feb-01
Included in the Prior Art Database: 2005-Feb-02

Publishing Venue

IBM

Related People

Authors:
Fredericks, EC Via, GG [+details]

Abstract

The chromium metal coating used on optical masks to prevent li exposure in selective mask areas has the property of transmitting (or reflecting) various wavelengths of light with various effici- encies. Using this property, a novel photo mask capable of exposing different sized features, at different wavelengths of ultraviolet light, can be constructed.