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Chemical Etching of Alumina

IP.com Disclosure Number: IPCOM000040872D
Original Publication Date: 1987-Feb-01
Included in the Prior Art Database: 2005-Feb-02

Publishing Venue

IBM

Related People

Authors:
Pridans, JV Tsakanikas, P [+details]

Abstract

Oxygen rich alumina can be chemically etched in a solution wit a higher concentration of phosphoric acid than that used for oxyge poor alumina.