Alternative Material for Terminal Metal Deposition Mask
Original Publication Date: 1987-Mar-01
Included in the Prior Art Database: 2005-Feb-02
It is proposed that a photosensitive, crystalline glass or glass-ceramic be used as an alternative material for deposition masks used to process semiconductor devices and semiconductor packages. The dimensional and flatness control of the proposed mask is better than that of the conventional one made from molybdenum.