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Alternative Material for Terminal Metal Deposition Mask

IP.com Disclosure Number: IPCOM000040893D
Original Publication Date: 1987-Mar-01
Included in the Prior Art Database: 2005-Feb-02

Publishing Venue

IBM

Related People

Authors:
Kapner, H [+details]

Abstract

It is proposed that a photosensitive, crystalline glass or glass-ceramic be used as an alternative material for deposition masks used to process semiconductor devices and semiconductor packages. The dimensional and flatness control of the proposed mask is better than that of the conventional one made from molybdenum.