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Photodiode Mask for Endpoint Detection System

IP.com Disclosure Number: IPCOM000040895D
Original Publication Date: 1987-Mar-01
Included in the Prior Art Database: 2005-Feb-02

Publishing Venue

IBM

Related People

Authors:
Durham, JA Sierck, F [+details]

Abstract

The use of a mask to avoid unwanted reflections from reaching the photodiode in an endpoint detection system results in improved accuracy and reliability of the system.