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A New Design for a Non-Contact Wafer Scrubber

IP.com Disclosure Number: IPCOM000040953D
Original Publication Date: 1987-Apr-01
Included in the Prior Art Database: 2005-Feb-02

Publishing Venue

IBM

Related People

Authors:
Alexander, S Brown, TH [+details]

Abstract

Collodial gas aphrons (CGAs) are well suited for use in semico ductor manufacturing for non-contact wafer cleaning. The diameter of the CGA bubble (approximately 25 microns) is on the same order as that of circuit dimension which makes it ideal for cleaning.