A New Design for a Non-Contact Wafer Scrubber
Original Publication Date: 1987-Apr-01
Included in the Prior Art Database: 2005-Feb-02
Collodial gas aphrons (CGAs) are well suited for use in semico ductor manufacturing for non-contact wafer cleaning. The diameter of the CGA bubble (approximately 25 microns) is on the same order as that of circuit dimension which makes it ideal for cleaning.