Single Layer Resist Enahnced Reflow Process that Produces Resist Undercutting Suitable for Metal Lift-off
Original Publication Date: 1987-May-01
Included in the Prior Art Database: 2005-Feb-02
Photoresist structures for lift-off processes require that there be some overhang to allow metal lift-off. This article discloses an additional process step which improves the metal lift-off profile in a photoresist layer.