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Self-Sealing, Free Theta Rotation Vacuum Chuck/Pedestal Disclosure Number: IPCOM000041023D
Original Publication Date: 1987-May-01
Included in the Prior Art Database: 2005-Feb-02

Publishing Venue


Related People

Baker, DE Grau, P Kolan, GH [+details]


The self-sealing, free theta rotation vacuum chuck/pedestal shown in cross-section in the figure provides a novel means for supporting semiconductor wafers. The chuck/pedestal provides a continuous vacuum to hold a wafer in place, yet allows a full 360 degrees rotation with only two parts.