Self-Sealing, Free Theta Rotation Vacuum Chuck/Pedestal
Original Publication Date: 1987-May-01
Included in the Prior Art Database: 2005-Feb-02
The self-sealing, free theta rotation vacuum chuck/pedestal shown in cross-section in the figure provides a novel means for supporting semiconductor wafers. The chuck/pedestal provides a continuous vacuum to hold a wafer in place, yet allows a full 360 degrees rotation with only two parts.