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Browse Prior Art Database

200mm Vacuum Tip

IP.com Disclosure Number: IPCOM000041117D
Original Publication Date: 1987-Aug-01
Included in the Prior Art Database: 2005-Feb-02

Publishing Venue

IBM

Related People

Authors:
Kopecky, HR Rosenfeld, LH [+details]

Abstract

A vacuum pencil tip has been developed which can conveniently pick up the increased weight of 200 mm wafers used in semiconductor devices.