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Ultra Fast Etchant for Gold, Copper And Silver Films

IP.com Disclosure Number: IPCOM000041140D
Original Publication Date: 1987-Sep-01
Included in the Prior Art Database: 2005-Feb-02

Publishing Venue

IBM

Related People

Authors:
Brady, MJ Duran, J Montelbano, TO Vazquez, JE [+details]

Abstract

This article relates generally to selective etching processes for metal and more particularly relates to a method for etching sputtered or evaporated films of gold, copper and silver.