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Pickup Tabs And Horizontal Detents for Wafer Carriers

IP.com Disclosure Number: IPCOM000041157D
Original Publication Date: 1987-Oct-01
Included in the Prior Art Database: 2005-Feb-02

Publishing Venue

IBM

Related People

Authors:
Mulligan, JM Walsh, TJ [+details]

Abstract

Improvements to semiconductor wafer carriers can facilitate their handling both manually and automatically, as well as to provide a reduction in tolerance accumulations.