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Process for Making Electroplated Metal Lines With Controlled Edge Slope

IP.com Disclosure Number: IPCOM000041217D
Original Publication Date: 1987-Dec-01
Included in the Prior Art Database: 2005-Feb-02

Publishing Venue

IBM

Related People

Authors:
Cronin, JE Wright, TM [+details]

Abstract

A photoresist process normally used for the formation of lift-off patterns is used to guide the growth of electroplated metal. This will define the shape of the deposited metal.