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Real Time Control of Photo Exposure Dose

IP.com Disclosure Number: IPCOM000041220D
Original Publication Date: 1987-Dec-01
Included in the Prior Art Database: 2005-Feb-02

Publishing Venue

IBM

Related People

Authors:
Chappelow, RE Charney, MR [+details]

Abstract

Photo exposure dose is adjusted and controlled for every exposure to assure correct exposure of photoresist that may have a sensitivity to such factors as: time delay after a sensitizing process, barometric pressure, humidity, etc.