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Piezoelectric Xy Translator

IP.com Disclosure Number: IPCOM000041701D
Original Publication Date: 1984-Mar-01
Included in the Prior Art Database: 2005-Feb-02

Publishing Venue

IBM

Related People

Authors:
Bednorz, JG Gueret, PL Pohl, WD Widmer, DF [+details]

Abstract

This translator permits displacement of a probe of a scanning device in x and y directions on the order of millimeters but with nanometer accuracy. The translater comprises a support plate 1 having a slot 2, and clamping members 3, 4 and 5 to provide a channel 6 for the gliding elements 7 and 8 of a cross-shaped plate 9. Gliding elements 7 and 8 have a profile fitting a corresponding profile in clamping members 3, 4 and 5. On the face of plate 9 opposite gliding elements 7 and 8, there are like gliding elements 10 and 11 which fit into channel 12 provided by clamping members 13, 14 and 15 attached to a slotted base plate 16 and mounted such that channels 6 and 12 are mutually orthogonal.