Process for the Fabrication of Narrow-Track Flex-File Recording Heads
Original Publication Date: 1984-Mar-01
Included in the Prior Art Database: 2005-Feb-03
A single operation, chemically enhanced, laser etching process forms the head width on a magnetic transducer head row. The figure shows a head row that may contain 15 or more flexible magnetic file heads. The head row includes a ferrite sandwich formed of ferrite elements 3 separated by a glass gap 4. The head gaps having a width 6 are formed by laser etching away the areas 5. The reactive ion etching process involves generating a pattern with photoresist on a sputter-deposited seed layer, electroplating a metal mask, reactive ion etching the pattern into the ferrite, and removing the metal mask. Using chemically enhanced laser etching, the same process is accomplished in a single operation.