Browse Prior Art Database

Holder for Substrate and Mask With Compensation for Expansion During Heating Associated With Vacuum Deposition

IP.com Disclosure Number: IPCOM000042102D
Original Publication Date: 1984-Mar-01
Included in the Prior Art Database: 2005-Feb-03

Publishing Venue

IBM

Related People

Authors:
Nuccio, C [+details]

Abstract

A ceramic substrate 1 that is to receive a layer of metal by vacuum deposition is mounted in a square substrate locator frame, and a mask 2 is mounted in a separate rectangular mask frame 3. The locator frame has slidable jaws 4 located to face the corners of the substrate frame along the diagonals of the frame. Thus, the jaws tend to position the locator frame with its diagonals located along predetermined lines between opposite pairs of jaws, but the jaws accommodate variations in the size of the substrate. The mask and substrate frames are positioned inside a support that has an inwardly sloping conical surface. At each corner of the frames a pin 5 interconnects the mask frame, one of the jaws, the locator frame, and the conical support.