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Browse Prior Art Database

Compressed Y-Dimension Reticle

IP.com Disclosure Number: IPCOM000042247D
Publication Date: 2005-Feb-03

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a method that uses the relative speed of the reticle and wafer stages to maximize the field size and compensate for the compressed y-dimensions on the reticle. Benefits include increasing throughput time.