Gas Phase Surface Incorporation Techniques for the Preparation of Surface Level Metallic Contamination Standards
Publication Date: 2005-Feb-03
The IP.com Prior Art Database
Disclosed is a method that uses gas phase surface incorporation (GAPSINC) techniques; this method uses dry gas phase plasma systems to produce surface-level metallic contamination standards over any substrate material. Benefits include producing wafers with good uniformity, a wide range of density levels, and a longer shelf life.