Dismiss
The InnovationQ application will be updated on Sunday, May 31st from 10am-noon ET. You may experience brief service interruptions during that time.
Browse Prior Art Database

Method for EUV photoresist polymers with attached surfactant groups

IP.com Disclosure Number: IPCOM000042258D
Publication Date: 2005-Feb-03

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a method for extreme ultraviolet (EUV) photoresist polymers with attached surfactant groups. Benefits include improved performance, improved reliability, and improved cost effectiveness.