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Optimization of Material Selection and Service Life of Polymer Membranes or Pellicles for Lithography Applications

IP.com Disclosure Number: IPCOM000042260D
Publication Date: 2005-Feb-03

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a method that uses a transparent and durable thin film, free-standing membrane that has conventional measurements and no special sample preparations. The disclosed method also uses non-destructive n and k measurements to uncover early signs of polymer pellicle degradation.