Optimization of Material Selection and Service Life of Polymer Membranes or Pellicles for Lithography Applications
Publication Date: 2005-Feb-03
The IP.com Prior Art Database
Disclosed is a method that uses a transparent and durable thin film, free-standing membrane that has conventional measurements and no special sample preparations. The disclosed method also uses non-destructive n and k measurements to uncover early signs of polymer pellicle degradation.