Modular Grind/Polish System
Original Publication Date: 1984-May-01
Included in the Prior Art Database: 2005-Feb-03
Shown in the figure is a modular grinding and polishing system wherein a workpiece, such as a magnetic disk substrate, can progress from initial grinding to final cleaning without operator intervention or handling. The apparatus includes a station 1 where the workpiece is ground, a cleaning station 2, and polishing stations 3 and 5 followed by cleaning stations 4 and 6, respectively. The workpiece is carried between operating stations by a disk carrier 11, and each station for grinding and polishing includes wheel dressing apparatus 12.