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Low Impedance Creep-Free Room Temperature Mechanical Pump Trapping Technique

IP.com Disclosure Number: IPCOM000042731D
Original Publication Date: 1984-Jun-01
Included in the Prior Art Database: 2005-Feb-04

Publishing Venue

IBM

Related People

Authors:
O'Hanlon, JF [+details]

Abstract

Concepts of viscous flushing and sorption of oil on a suitable material are incorporated in a novel technique so as to produce a trap which will not allow oil to backstream through the volume or creep along the wall. This technique may have particular application for low pressure chemical vapor deposition and reduced pressure epitaxy of materials, such as gallium arsenide, where high gas flows are required, but where contamination due to the small creep of oil cannot be tolerated. Currently there are no room temperature traps for stopping the backstreaming of oil from a mechanical pump to a vacuum chamber which will stop creep and allow high gas flow.