Gripper Assembly for a Robot
Original Publication Date: 1984-Jun-01
Included in the Prior Art Database: 2005-Feb-04
This assembly enables a robot to load and unload glass masks and masks carriers for photolithographic equipment. The assembly handles masks and mask carriers with greater precision and less damage than a human operator functioning in a critical area where body heat and contamination cause problems. The unique features in the assembly include (1) the ability to protect the masks from damage if interference is encountered in any direction or plane of rotation, (2) sensitivity adjustment to ensure that minimum force will stop the robot in case of interference, and (3) positive feedback indicating that the mask is fully engaged and square to the assembly. In Fig. 1, a robot head 1 is connected to a gripper assembly 3 which includes a support housing 4, pancake cylinder actuators 6 and gripper fingers 8.