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Extreme High Temperature Graphite Vacuum Chuck

IP.com Disclosure Number: IPCOM000042853D
Original Publication Date: 1984-Jun-01
Included in the Prior Art Database: 2005-Feb-04

Publishing Venue

IBM

Related People

Authors:
Heuslein, FJ Wanser, R [+details]

Abstract

In the semiconductor industry it is often necessary that glass and quartz materials in the form of tubing be closed at one end with a plate. Because of the high temperatures involved, it is extremely difficult to maintain the plate in a rigid, fixed position on the tube end since it is necessary that both the tube and the plate rotate while being sealed together. The present invention is particularly directed toward a unique vacuum chuck for holding a flat disc of quartz 10, in a glass lathe 11, such that it can be precisely positioned with respect to the end of a tube 12 onto which it is to be sealed. The chuck comprises a graphite head 13 having a plurality of holes (not shown) spaced 120Πapart in the face thereof.