Cartesian Translation-Polar Rotation of a Memory Image to Align a Part in an E-Beam Substrate Tester
Original Publication Date: 1984-Jun-01
Included in the Prior Art Database: 2005-Feb-04
A test part for an E-Beam tester must be properly aligned. This can be done by: 1. The test part is raster scanned, stored in memory, and the cartesian coordinate location of two alignment marks and the distance between them are factored in. 2. The design alignment vectors have the electron lens distortion values factored in from a previous calibration routine. 3. The translation alignment tolerance excludes the possibility of more than one part image feature being within the translation tolerance "window" (Fig. 1). Memory (not the part) can be searched for the x, y location of the image translate alignment mark (Fig. 2). The vector difference between the design and image translate align mark will become a constant operator which will translate each vector of data during test.