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Browse Prior Art Database

Precision Tooling for the Placement of Locating Features in Microcircuit Masks

IP.com Disclosure Number: IPCOM000043107D
Original Publication Date: 1984-Jul-01
Included in the Prior Art Database: 2005-Feb-04

Publishing Venue

IBM

Related People

Authors:
Lahey, GL Levine, JE Wirtz, LH Yakubowski, C [+details]

Abstract

A series of thin metal masks used in fabricating high density multilayer circuits are registered precisely relative to a prepositioned ceramic green sheet. As shown in the drawing, a punch plate 1 is raised to accept a metal mask 9 that is located by four pins 14, which position the mask accurately relative to the punches 13. When a start button is depressed, the punch plate 1 is brought in contact with the mask 9 by a hydraulically actuated rod 6. The punch plate 1 is located on the die plate 2 using three pneumatically operated pins 4, and the punch plate is locked to the die plate using pneumatic locks 5. Thereafter, five punches 13 are activated punching the new locating holes in the mask 9 and mating with holes 15.