Silicon Nitride Coating on Ferrite Read/Write Heads
Original Publication Date: 1984-Jul-01
Included in the Prior Art Database: 2005-Feb-04
Laminar ferrite cores for read/write magnetic heads are protected against wear by plasma deposition of silicon nitride on the outer faces of the core. This deposition also rounds off sharp corners. An earlier article [*] describes the sputter deposition of alumina which may be used in the manufacture of magnetic heads to provide a wear-resistant coating. This deposition process has the disadvantage that the time taken to deposit a thin film may typically be 30 hours and the resultant coating may be highly stressed. Here, the use of silicon nitride as an alternative to alumina is disclosed. Silicon nitride is formed by plasma-induced reaction at typically 300ŒC.