STRAIN-FREE Nb JOSEPHSON JUNCTION DEVICE ELECTRODES
Original Publication Date: 1984-Aug-01
Included in the Prior Art Database: 2005-Feb-04
A multilayered strain-free Nb film with a nitrided surface will serve as an electrode for a Josephson junction device. The strain at the substrate surface reverses as the film gets thicker when the surface is nitrided. The 10-nanometer thickness balances the strain in each direction. The strain-free Nb films with desired thickness can be prepared by repeating deposition of 10 nm thick Nb films and nitrogen gas leak in the chamber until the desired thicknesses are obtained.