Chemisorption Technique for Trapped Gas Analysis
Original Publication Date: 1984-Aug-01
Included in the Prior Art Database: 2005-Feb-04
Trapped gas species in thin films or other materials can cause serious manufacturing problems, such as poor adhesion between layers or loss of physical integrity of the film structure. To detect the trapped gas, thermal processing or mechanical friction is used while the sample is in vacuum, in order to release the gas species. These species are normally detected by, for example, mass spectrometry. However, it is difficult to detect the released species this way, and a considerable portion of the released gas may adsorb upon the chamber walls or undergo other reactions at the chamber walls. The efficiency for collecting the released gas is also quite low in these techniques. In the present invention, the released gas is more efficiently trapped, and can be detected by chemical analysis.