Ultra Fine Silicon Filter Element
Original Publication Date: 1984-Aug-01
Included in the Prior Art Database: 2005-Feb-04
Increasing demands are being made on the maximum size of particulates that may be tolerated in fluids. In order to filter out particulates of the order of a micron or so, technology exists to make filters with filtering channels of the order of a micrometer or material used in such applications is usually some polymer that has been suitably treated and the filtering pores etched. The use of polymers in these applications may preclude their use in many organic solvents and the size of the pores today need to be made much smaller, of technology. p-conductivity type silicon, when anodized in a hydrofluoric acid (HF) solution acquires a surface layer composed of microscopic pores. These pores form a network of channels that span the upper layer in all directions.