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Annealability of Thin Film Chromium As Deposition Temperature Monitor

IP.com Disclosure Number: IPCOM000043419D
Original Publication Date: 1984-Aug-01
Included in the Prior Art Database: 2005-Feb-04

Publishing Venue

IBM

Related People

Authors:
Corliss, LO Hoffman, HS Kung, P [+details]

Abstract

A thin film of chromium has the property of permanently changing in resistance as a function of time and temperature. For a given deposition process, the change in resistivity indicates time/temperature exposure during the entire deposition cycle. The method by which chromium film is used to dynamically monitor temperature is described as follows: 1. Metallized temperature monitors, i.e., glass or ceramic substrates, are used with thin film Cr (typically 800 ňúthick and a 100 C deposition temperature). Measure each for sheet resistance using four-point probes. 2. Place the monitors in the deposition system with the non- metallized side facing the deposition source. 3. Perform the entire deposition cycle. 4.