Method of Producing Thin Layers by Simultaneously Implanting Atomic and Molecular Ions
Original Publication Date: 1984-Nov-01
Included in the Prior Art Database: 2005-Feb-05
The stoichiometric composition of thin layers produced in a solid by ion implantation is determined by the sputter yield S. For suitably tailoring this composition, the experimental result is used that molecular ions have a higher sputter yield S2 per atom than atomic ions S1 . If molecular ions A+2 and atomic ions A+ are simultaneously implanted in the solid, the resultant sputter yield and thus the resultant concentration of the substance A in the solid is determined by the ion current ratio j(A+)/j(A+2). If, for example, Te+ (E = 150 keV) with S1 = 3 and Te+ 2 (E = 300 keV) with S2 = 4 are simultaneously implanted in a silicon crystal, a stoichiometric relationship of between 0.25 and 0.33 can be selectively adjusted. The method can also be used for other ions and crystals.