Vacuum Pickup for a Robotic Arm
Original Publication Date: 1984-Nov-01
Included in the Prior Art Database: 2005-Feb-05
The sequence of Figs. 1 through 5b illustrates the deck vacuum pickup robotic end effector. Fig. 1 illustrates the deck 2 which has a plurality of semiconductor chips 4 and 4' mounted on its upper surface. The upward facing surface of the chips 4 and 4' is a smooth surface suitable for being picked up by a vacuum pencil. Fig. 2 illustrates the basic concept of the invention. A plurality of vacuum pencils or suction tubes 8 and 8' are respectively mounted on a plenum block 6 so as to be capable of coming into contact with the upward facing surfaces of the chips 4 and 4' on the deck 2. A vacuum may be drawn on the hollow plenum block 6 by means of the vacuum line 10. An optional pressure line 12 may provide positive air pressure to the plenum block 6 to purge the vacuum, when necessary. Fig.