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Browse Prior Art Database

Substrate Holder

IP.com Disclosure Number: IPCOM000044365D
Original Publication Date: 1984-Dec-01
Included in the Prior Art Database: 2005-Feb-05

Publishing Venue

IBM

Related People

Authors:
Levine, JE Wirtz, LH Yakubowski, C [+details]

Abstract

Thin delicate metal substrates, such as those used in the screening of circuit patterns, are produced by a photolithographic process. A process support frame is described that can carry the part through several sectors, eliminating many transfer operations that are now part of the process. Some of these sectors will include in-process inspections. The frame is light weight and inert to process chemicals. In addition, it can be readily adapted to batch processing where the volume is necessary. The frame will accept a part after the pattern has been exposed through a photo mask in a sensitized polymer. The frame is made non-conductive so it can be used as a plating frame. There will be no build-up of the metal being plated and no stripping will be necessary as with conductive frames. The frame 1, as shown in Fig.