Planarization of Organic Coatings by Directing a Milling Ion Beam on the Surface at an Acute Angle
Original Publication Date: 1984-Dec-01
Included in the Prior Art Database: 2005-Feb-06
Multilayered structures using polyimide or similar coatings as insulators and having wiring and or channels imbedded below the surface result in a disturbed or waved surface. This type of surface is undesirable for reasons such as variations in capacitance and inductances between the various elements and having a detrimental effect as well on the resolution of wiring or devices fabricated on top of the surface. This problem is caused during fabrication of the insulating layer by the surface tension of the organic coating deposited in the liquid form over an irregular topography. Subsequent layers of the organic coating have the tendency to accentuate these defects. In order to alleviate this problem it is essential to remove or reduce these imperfections at an early stage without damage to the structure.