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High Pressure Cleaning System for Disks Disclosure Number: IPCOM000044924D
Original Publication Date: 1983-Jan-01
Included in the Prior Art Database: 2005-Feb-06

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Bergh, TA Chew, K Stokes, KH [+details]


Several companies have developed the so-called "brushless scrubbers" for silicon wafers using a jet of high pressure liquid, usually DI water. The above technique can be applied to the cleaning of magnetic disks (both substrates and magnetically coated disks). Substrates cleaned by this method using a proto-type model have shown yield increases at single disk test from the normal (control) at 77% to 95-100%. The method is particularly effective against "B" side defects with typical missing bit valves being reduced by factors of 2 to 6.